Surface-acoustic-wave, digitized angular accelerometer
Surface/bulk micromachined single-crystalline silicon...
Suspension arrangement for semiconductor accelerometer
Suspension for micromechanical structure and micromechanical acc
Suspension mechanism for high performance accelerometers
Suspension system for a transducer
Swing parameter measurement system
Swing speed device
Swing velocity indicator
Symmetrical differential capacitive sensor and method of...
Symmetrical micromechanical gyroscope
Synchronous FM digital detector
System and method for a three-axis MEMS accelerometer
System and method for calibrating semiconductor processing...
System and method for detecting vehicle mechanical loading
System and method for determining formation fluid parameters...
System and method for measurements of depth and velocity of...
System and method for measuring movement of objects
System and method for mitigating errors in electrostatic...
System and method for the detection of ballistic impacts...