Symmetrical differential capacitive sensor and method of...

Details Symmetrical differential capacitive sensor and method of... Symmetrical differential capacitive sensor and method of...

2007-08-03

2009-08-25

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514320

Reexamination Certificate

active

07578190

ABSTRACT:
A symmetrical differential capacitive sensor (60) includes a movable element (66) pivotable about a geometrically centered rotational axis (70). The element (66) includes sections (86, 88). Each of the sections (86, 88) has a stop (94, 96) spaced equally away from the rotational axis (70). Each of the sections (86, 88) also has a different configuration (104, 108) of apertures (102, 106). The configurations (104, 108) of apertures (102, 106) create a mass imbalance between the sections (86, 88) so that the element (66) pivots about the rotational axis (70) in response to acceleration. The apertures (102, 106) also facilitate etch release during manufacturing and reduce air damping when the element (66) rotates. Apertures (126, 128) are formed in electrodes (78, 80) underlying the apertures (102, 106) to match the capacitance between the two sections (86, 88) of movable element (86) to provide the same bi-directional actuation capability.

REFERENCES:
patent: 5404749 (1995-04-01), Spangler
patent: 6230566 (2001-05-01), Lee et al.
patent: 6428713 (2002-08-01), Christenson et al.
patent: 6571628 (2003-06-01), Miao et al.
patent: 6666092 (2003-12-01), Zarabadi et al.
patent: 6935175 (2005-08-01), Eskridge et al.
patent: 6955086 (2005-10-01), Yoshikawa et al.
patent: 7005193 (2006-02-01), McNeil et al.
patent: 7059190 (2006-06-01), Sakai et al.
patent: 7140250 (2006-11-01), Leonardson et al.
patent: 7225675 (2007-06-01), Kato et al.
patent: 2005/0202585 (2005-09-01), Eskridge
patent: 2007/0000323 (2007-01-01), Kuisma
International Search Report and Written Opinion correlating to PCT/US2008/068080, dated Jan. 13, 2009.

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