Suspension for micromechanical structure and micromechanical acc

Details Suspension for micromechanical structure and micromechanical acc Suspension for micromechanical structure and micromechanical acc

1995-08-31

1997-07-08

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351438, G01P 15125

Patent

active

056463472

ABSTRACT:
A suspension or an acceleration sensor having a suspension is proposed, by means of which a micromechanical structure or the acceleration sensor is anchored on a substrate. The suspension takes place by means of lever elements on which an equalizing beam acts. The lever elements are deformed by the stresses in the equalizing beam with respect to the substrate in such a way that the stresses in the microstructure with respect to the substrate are either compensated for or, alternatively, are converted from compressive stresses to tensile stresses or from tensile stresses to compressive stresses.

REFERENCES:
patent: 4879914 (1989-11-01), Norling
patent: 5331853 (1994-07-01), Hulsing
Microsystem Technologies 90, 1st Int. Conference on Microsystems, Berlin, 10-13 Sep. 1990, Springer-Verlag, p. 529 ff. by Mohr et al., "Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems".

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