System and method for a three-axis MEMS accelerometer

Details System and method for a three-axis MEMS accelerometer System and method for a three-axis MEMS accelerometer

2008-05-06

2008-05-06

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07367232

ABSTRACT:
A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The accelerometer includes a sensor die made of a semiconductor substrate having a frame element, a proof mass element, and an elastic element mechanically coupling the frame and the proof mass. The accelerometer also has three or more stress-sensitive IC components integrated into the elastic element adjacent to the frame element for electrical connectivity without metal conductor traversal of the elastic element.

REFERENCES:
patent: 4869107 (1989-09-01), Murakami
patent: 4967605 (1990-11-01), Okada
patent: 5005414 (1991-04-01), Holland et al.
patent: 5095762 (1992-03-01), Holm-Kennedy et al.
patent: 5231879 (1993-08-01), Yamamoto
patent: 5295386 (1994-03-01), Okada
patent: 5485749 (1996-01-01), Nohara et al.
patent: 5537882 (1996-07-01), Ugai et al.

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