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Temperature control system for a workpiece chuck

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Temperature control system for semiconductor processing faciliti

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent

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Temperature controllable gas distributor

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Temperature controlled chuck for vacuum processing

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Patent

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Temperature controlling device for mask and wafer holders

Heat exchange – With timer – programmer – time delay – or condition responsive... – Temperature responsive or control
Patent

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Temperature regulator for burn-in board components

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent

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Temperature selectable water supply device

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Temperature-control apparatus for a printing machine

Heat exchange – With timer – programmer – time delay – or condition responsive... – Temperature responsive or control
Reexamination Certificate

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Temperature-controlled chuck with recovery of circulating...

Heat exchange – With timer – programmer – time delay – or condition responsive... – Vent of system
Reexamination Certificate

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Temperature-controlled water delivery system

Heat exchange – With timer – programmer – time delay – or condition responsive... – Temperature responsive or control
Patent

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Temperature-Humidity controller for semiconductor equipment...

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Thermal management apparatus for a sealed enclosure

Heat exchange – With timer – programmer – time delay – or condition responsive... – Temperature responsive or control
Reexamination Certificate

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Thermal processor

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Thermal reservoir for two-pipe hydronic air-conditioning system

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Thermal storage controller

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent

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Thermally conductive chuck for vacuum processor

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of amount of conductive gas in confined space...
Reexamination Certificate

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Thermally controlled active heat switch system

Heat exchange – With timer – programmer – time delay – or condition responsive... – Control of heat pipe heat transfer characteristics
Reexamination Certificate

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Thermostat having a multiple color signal capability with single

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent

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Thermostat system having an optimized temperature recovery ramp

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent

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Thermostatic coolant circulating device

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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