4. Etching a substrate: processes
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Application of the CVD bilayer ARC as a hard mask for...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Applying imprinting material to substrates employing...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Aqueous dispersion for CMP, polishing method and method for...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Arc layer having a reduced flaking tendency and a method of...

Etching a substrate: processes – Forming or treating optical article
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Automated method for monitoring and controlling the orthophospho

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
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Automated process for making flexible plates from a sheet introd

Etching a substrate: processes – Nongaseous phase etching of substrate
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Automatic etchant regeneration system with highly accurate...

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
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