MEMS optical mirror array

MEMS plate switch and method of manufacture

MEMS relay with a flux path that is decoupled from an...

MEMS RF-switch using semiconductor

MEMS switch and manufacturing method thereof

MEMS switch and manufacturing method thereof

MEMS switch and method of fabricating the same

MEMS switch electrode configuration to increase signal...

MEMS switch stopper bumps with adjustable height

MEMs switching circuit and method for an implantable medical...

MEMS switching device protection

MEMS-based inertial switch

Metal contact RF MEMS single pole double throw latching switch

Method and apparatus for bending electrostatic switch

Method and apparatus for reducing cantilever stress in...

Method of constructing a relay

Method of micromachining electromagnetically actuated current sw

Method of preparing electrical contacts used in switches

Methods and apparatus for reducing bounce between relay...

Micro actuator and optical switch using the actuator