Micro actuator and optical switch using the actuator

Details Micro actuator and optical switch using the actuator Micro actuator and optical switch using the actuator

2006-10-03

2006-10-03

Lee, Kyung S. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07116192

ABSTRACT:
The movable part is constructed from a bridge part13with a cantilever structure in which the fixed end is fastened via a leg part12.The bridge part13has two bridge constituent parts14and15that are connected in series between the fixed end and the free end. The bridge constituent part14on the side of the fixed end is a plate spring part. The bridge constituent part15on the side of the free end is a rigid part that possesses rigidity. The bridge constituent part14is bent toward the opposite side from the substrate11in a state in which the bridge part13receives no force. The mirror2is disposed on the free end side of the bridge constituent part15.As a result, a microactuator can be obtained which can be operated by a small driving force.

REFERENCES:
patent: 5638946 (1997-06-01), Zavracky
patent: 6195478 (2001-02-01), Fouquet
patent: 6320145 (2001-11-01), Tai et al.
patent: 6532093 (2003-03-01), Sun et al.
patent: 6875936 (2005-04-01), Suzuki et al.
patent: 2002/0027487 (2002-03-01), Suzuki
patent: 2002-023073 (2002-01-01), None
patent: 2002-072127 (2002-03-01), None

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