Method of micromachining electromagnetically actuated current sw

Details Method of micromachining electromagnetically actuated current sw Method of micromachining electromagnetically actuated current sw

1996-04-01

1997-07-29

Donovan, Lincoln

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

156155, 257644, H01H 5122

Patent

active

056525591

ABSTRACT:
An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a portion of the insulating layer so that the metal bridge extends over the via and the opening is situated adjacent a portion of the sacrificial layer. A reinforcing seal layer with a well is provided over the metal bridge so that the well is situated adjacent to at least a portion of the opening. The sacrificial layer is then removed.

REFERENCES:
patent: 5262000 (1993-11-01), Welbourn et al.
patent: 5374792 (1994-12-01), Ghezzo et al.
patent: 5384483 (1995-01-01), Huang
patent: 5472539 (1995-12-01), Saia et al.

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