MEMS switch stopper bumps with adjustable height

Details MEMS switch stopper bumps with adjustable height MEMS switch stopper bumps with adjustable height

2007-10-16

2007-10-16

Enad, Elvin (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

10740649

ABSTRACT:
In a Micro Electro-Mechanical System (MEMS) switch, a common switch failure is a short between the upper and the lower electrostatic actuation plates. Such shorts may occur due to torque deformation. Stopper bumps having a slightly lower height profile than that of the contact bumps are provided to prevent such shorts. The stopper bumps may be made using the same mask as that used to create the contact bump with the height of the respective bumps controlled by determining the diameter of the bumps.

REFERENCES:
patent: 6054659 (2000-04-01), Lee et al.
patent: 6307169 (2001-10-01), Sun et al.
patent: 6331257 (2001-12-01), Loo et al.
patent: 2003/0058069 (2003-03-01), Schwartz et al.
patent: 2003/0116417 (2003-06-01), DeReus

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