MEMS switch and manufacturing method thereof

Details MEMS switch and manufacturing method thereof MEMS switch and manufacturing method thereof

2006-05-08

2008-11-04

Mai, Anh (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07446634

ABSTRACT:
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

REFERENCES:
patent: 6069540 (2000-05-01), Berenz et al.
patent: 6720851 (2004-04-01), Hallbjorner et al.
patent: 7053736 (2006-05-01), Nelson
patent: 2002/0140533 (2002-10-01), Miyazaki et al.
patent: 0 986 082 (2000-03-01), None
patent: WO 99/62089 (1999-12-01), None

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