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Method and apparatus for balancing an electrostatic force produc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for balancing an electrostatic force produc

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for balancing an electrostatic force...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for bipolar ion generation

Electricity: electrical systems and devices – Electric charge generating or conducting means
Reexamination Certificate

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Method and apparatus for chucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for clamping a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for compensating non-uniform wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for conditioning an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for controlling chucking force in an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for controlling temperature of a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for creating an artificial electron cyclotr

Electricity: electrical systems and devices – Electric charge generating or conducting means – Modification of environmental electric charge
Patent

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Method and apparatus for dechucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for dechucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for dechucking a substrate from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for dechucking a workpiece from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for detecting arcs and controlling supply o

Electricity: electrical systems and devices – Electric charge generating or conducting means
Patent

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Method and apparatus for determining wafer warpage for optimized

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Method and apparatus for electrostatically charging a dielectric

Electricity: electrical systems and devices – Electric charge generating or conducting means – With specific power supply
Patent

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Method and apparatus for energy extraction

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for generating a negative charge effect in

Electricity: electrical systems and devices – Electric charge generating or conducting means – Modification of environmental electric charge
Patent

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