Electrostatic wafer clamp having low particulate contamination o
Electrostatically attracting electrode and a method of manufactu
Electrostatically attracting electrode and a method of...
Electrostatically screened, voltage-controlled electrostatic...
Energy transfer apparatus
Enhanced electrical shocking device with improved long life and
Enhanced non-lethal electric weapon
Equipment for holding a semiconductor wafer, a method for...
Erosion resistant electrostatic chuck
Erosion resistant electrostatic chuck with improved cooling syst
Extended range static eliminator with wide angle uniform air flo
Fence electrifying device
Focusing electrodes for high-intensity ionizer stage of electros
Fold-back power supply
Foraminous filter for use in air ionizer
Full area temperature controlled electrostatic chuck and...
Gas ionization system and method
Gas ionizing
Guard for electrostatic chuck
Guard ring electrostatic chuck