Radio frequency MEMS switch contact metal selection

Details Radio frequency MEMS switch contact metal selection Radio frequency MEMS switch contact metal selection

2007-06-26

2007-06-26

Lee, K. (Department: 2832)

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

C335S078000, C257S414000, C257S411000, C438S107000, C438S109000

Reexamination Certificate

active

11047344

ABSTRACT:
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, ‘hot-switched’ life cycle test results of 1.02×108and 2.70×108cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.

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