Recessed etch RF micro-electro-mechanical switch

Details Recessed etch RF micro-electro-mechanical switch Recessed etch RF micro-electro-mechanical switch

1998-07-17

2000-08-08

Luebke, Renee S.

Electricity: circuit makers and breakers

Electrostrictive or electrostatic

200512, 73510, H01H 5700

Patent

active

061004774

ABSTRACT:
A novel micro-electro-mechanical (MEMS) RF switch having a cavity (32) in a substrate (28) which creates a spacing between a conductive membrane (34) and a bottom electrode (38). The invention eliminates the need for the dielectric posts found in prior art MEMS RF switches, includes a flexure structure (36) in the membrane (34) which will reduce the required pull down voltage for the membrane, and reduces the stress and fatigue in the membrane due to switch activation.

REFERENCES:
patent: 4598181 (1986-07-01), Selby
patent: 5258591 (1993-11-01), Buck
patent: 5367136 (1994-11-01), Buck
patent: 5383364 (1995-01-01), Takahashi et al.
patent: 5473945 (1995-12-01), Grieff et al.
patent: 5578976 (1996-11-01), Yao

Affiliated with

Also associated with

Rating

Recessed etch RF micro-electro-mechanical switch does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Recessed etch RF micro-electro-mechanical switch, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Recessed etch RF micro-electro-mechanical switch will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1152068