Electricity: circuit makers and breakers – Electrostrictive or electrostatic
Reexamination Certificate
2011-06-14
2011-06-14
Friedhofer, Michael A (Department: 2833)
Electricity: circuit makers and breakers
Electrostrictive or electrostatic
C200S600000, C335S078000
Reexamination Certificate
active
07960662
ABSTRACT:
The micro-switch structure comprises, on a substrate1coated with a passivation layer2, a first signal line LS-INand a second signal line LS-OUTdisposed in the projected extension of one another, separated by a switching region10; a control electrode3in said region, a dielectric material4with high relative permittivity invariant in frequency, disposed on the control electrode in such a manner that, between the two signal lines, the control electrode is wider on either side and, in the orthogonal direction, the dielectric protrudes on either side of the control electrode and rests on the passivation layer; parallel ground lines, disposed symmetrically on either side of the signal lines and formed on a topological level separated from that of the signal lines by at least one insulating layer made of a material different from that of the passivation layer.
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Friedhofer Michael A
Lowe Hauptman & Ham & Berner, LLP
Thales
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