Microdrive apparatus

Microdynamic devices fabricated on silicon-on-sapphire substrate

Microdynamic release structure

Microelectric motor

Microelectricalmechanical system (MEMS) electrical isolator...

Microelectromechanical apparatus for elevating and tilting a...

Microelectromechanical apparatus for elevating and tilting a...

Microelectromechanical beam for allowing a plate to rotate in re

Microelectromechanical device having single crystalline...

Microelectromechanical device having single crystalline...

Microelectromechanical generator using bubbles

Microelectromechanical gyroscope

Microelectromechanical positioning apparatus

Microelectromechanical ratcheting apparatus

Microelectromechanical ratcheting apparatus

Microelectromechanical reciprocating-tooth indexing apparatus

Microelectromechanical rotary structures

Microelectromechanical system actuator for extended linear...

Microelectromechanical system and method for producing...

Microelectromechanical system for tilting a platform