Microdynamic devices fabricated on silicon-on-sapphire substrate

Details Microdynamic devices fabricated on silicon-on-sapphire substrate Microdynamic devices fabricated on silicon-on-sapphire substrate

1992-08-19

1994-07-19

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 42, 310309, 29596, 29598, H02N 100, H02K 1500

Patent

active

053312368

ABSTRACT:
Silicon-on-sapphire substrates are provided for the fabrication of micromechanical devices, such as micromotors. The high voltage stand-off characteristics of silicon-on-sapphire thereby provides for the construction of superior electrostatically driven devices and sensors capable of being driven at significantly higher applied potentials since silicon-on-sapphire has demonstrated a capability for building in the range of hundreds of Angstroms, or thick, in the range of microns very high speed, low power, very densely packed integrated circuits using standard silicon processing techniques. As a consequence, the electrostatically driven devices, micromotors, can be incorporated in the integrated circuits and yet be powered at elevated voltages to increase their work potential.

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