Microelectromechanical reciprocating-tooth indexing apparatus

Details Microelectromechanical reciprocating-tooth indexing apparatus Microelectromechanical reciprocating-tooth indexing apparatus

1998-09-10

1999-09-28

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Rotary

310 80, 310306, 310308, 74128, F16H 2116

Patent

active

059593768

ABSTRACT:
An indexing apparatus is disclosed that can be used to rotate a gear or move a rack in a precise, controllable manner. The indexing apparatus, based on a reciprocating shuttle driven by one or more actuators, can be formed either as a micromachine, or as a millimachine. The reciprocating shuttle of the indexing apparatus can be driven by a thermal, electrostatic or electromagnetic actuator, with one or more wedge-shaped drive teeth of the shuttle being moveable to engage and slide against indexing teeth on the gear or rack, thereby moving the gear or rack. The indexing apparatus can be formed by either surface micromachining processes or LIGA processes, depending on the size of the apparatus that is to be formed.

REFERENCES:
patent: 3083581 (1963-04-01), Jamison
patent: 5378583 (1995-01-01), Guckel
patent: 5631514 (1997-05-01), Garcia
J.H. Comtois and V.M. Bright, "Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications," Proceedings of the Solid-State Sensor and Actuator Workshop, pp. 174-177 (Jun. 2, 1996).
J.H. Comtois, M.A. Michalicek and C.C. Barron, "Fabricating Micro-Instruments in Surface-Micromachined Polycrystalline Silicon," Proceedings of the 43rd International Instrumentation Symposium Instrument Society of America, pp. 169-179 (1997).
Allen et al., "Micromachine Wedge Stepping Motor" 1998 ASME International Mechanical Engineering Congress and Exposition; Anaheim, CA, Nov. 1998.

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