4. Coating processes
  5. Measuring, testing, or indicating
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Optical CVD method with a strong optical intensity used during a

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent

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Optical filter and method of manufacturing the same

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Reexamination Certificate

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Optical methods for controlling layer thickness

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent

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Ozone-processing apparatus for semiconductor process system

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Reexamination Certificate

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