Optical methods for controlling layer thickness

Details Optical methods for controlling layer thickness Optical methods for controlling layer thickness

1982-12-07

1985-06-25

Beck, Shrive P.

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 39, 118712, B05D 306

Patent

active

045253765

ABSTRACT:
An optical method for controlling the thickness of a layer of material as it is deposited upon a substrate advanced through a glow discharge chamber. A source of radiant energy of white light, and a detector are so positioned that the energy of the source is reflected from the substrate to the detector. A control system accepts the output of the detector to generate control signals responsive to layer thickness for adjusting the deposition parameters of the chamber.

REFERENCES:
patent: 3773548 (1973-11-01), Baker et al.

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