4. Coating apparatus
  5. Gas or vapor deposition
  6. Having means to expose a portion of a substrate to coating...
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Heater with shadow ring and purge above wafer surface

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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High aspect ratio clamp ring

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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High-vacuum coating apparatus

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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Holding apparatus, a metal deposition system, and a wafer proces

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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