4. Coating apparatus
  5. Gas or vapor deposition
  6. Having means to expose a portion of a substrate to coating...
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In situ adaptive masks

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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In-line deposition processes for circuit fabrication

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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