High aspect ratio clamp ring

Details High aspect ratio clamp ring High aspect ratio clamp ring

1996-07-30

1998-09-22

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

118728, 118500, 118503, 118720, 20429815, 20429811, 156345, C23C 1600, C23C 1400, C23F 102, B05C 1300

Patent

active

058109315

ABSTRACT:
The present invention provides a method and apparatus for protecting the edge of a substrate and securing the substrate to the support member during processing. The present invention preferably provides minimal contact with the substrate and provides improved edge exclusion. Support tabs extend inwardly from the lower roof surface to support the apparatus on the substrate and the inner terminus of the apparatus approaches the edge of the substrate to provide the improved edge exclusion. A variable height lower roof surface is provided over the edge of the substrate to provide an effective increased roof aspect ratio (width of the roof:height of the roof above the substrate) over the edge of the substrate which reduces the likelihood that a bridging layer will form between the apparatus and the substrate or beyond the substrate.

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