4. Coating apparatus
  5. Condition responsive control
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Vaccum arc vapor deposition device

Coating apparatus – Condition responsive control
Patent

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Vacuum exhaust system for processing apparatus

Coating apparatus – Condition responsive control
Patent

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Vacuum processing chamber with controlled gas supply valve

Coating apparatus – Condition responsive control – Valve actuator
Reexamination Certificate

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Valve control system for atomic layer deposition chamber

Coating apparatus – Condition responsive control – Valve actuator
Reexamination Certificate

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Vapor phase processing apparatus

Coating apparatus – Condition responsive control
Patent

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