4. Cleaning and liquid contact with solids
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Wafer backside plate for use in a spin, rinse, and dry...

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Wafer chucking apparatus and method for spin processor

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Wafer cleaning device and tray for use in wafer cleaning device

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Washing device and its work conveying method

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Washing device for machine parts and method of using the device

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Patent

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Washing method and washing apparatus

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Patent

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Wet cleaning process and wet cleaning equipment

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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