Washing method and washing apparatus

Details Washing method and washing apparatus Washing method and washing apparatus

1998-03-06

2000-08-22

El-Arini, Zeinab

Cleaning and liquid contact with solids

Processes

With work or work parts movable during treatment

134 32, 134 34, 134144, 134902, B08B 102, B08B 302, B08B 304

Patent

active

061066354

ABSTRACT:
A washing method provides a liquid jet washing by jetting a liquid against a rotating thin-plate-shaped workpiece from a nozzle which shifts while being positioned opposite a front or back surface of the workpiece, thus removing dust adhering to the front or back surface and thereby washing the workpiece. The locus of the shifting nozzle is caused to pass in the vicinity of, but not over, the center of rotation of the workpiece. Electronic circuitry present at the central portion of workpiece is prevented from suffering electrostatic breakage caused by collision with washing liquid. At the same time, an appropriate quantity of washing liquid is made to collide with the entire surface of a workpiece, so that the workpiece can be washed satisfactorily.

REFERENCES:
patent: 5349978 (1994-09-01), Sago et al.
patent: 5868866 (1999-02-01), Maekawa et al.
U.S. Patent Application No. 08/609,686, filed Mar. 1, 1996, by Toshiro Maekawa, et al., Entitled "Method and Apparatus for Cleaning Workpiece", (Patent No. 5,868,866).

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