4. Chemistry of inorganic compounds
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Handling of by-product gases from a silicon furnace

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent

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Heating method for silane pyrolysis reactor

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent

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Heating of fluidized bed reactor by microwaves

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
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High efficiency hydrocarbon reduction of silica

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent

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High purity metallurgical silicon and method for preparing same

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate

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High purity silicon production system and production method

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate

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Hydrogen purification process

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
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