Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent
1987-09-03
1989-10-03
Doll, John
Chemistry of inorganic compounds
Silicon or compound thereof
Elemental silicon
55 68, 55 73, 55 74, 62 18, 423350, 4236481, 427213, C01B 3302, B05D 700
Patent
active
048715247
ABSTRACT:
Hydrogen-containing effluent gas can be treated with activated carbon to remove boron or phosphorus impurity prior to recycle to a fluidized bed reactor. The process is conducted at cryogenic temperatures.
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Doll John
Ethyl Corporation
Langel Wayne A.
Pippenger P. M.
Sieberth J. F.
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