Heating method for silane pyrolysis reactor

Details Heating method for silane pyrolysis reactor Heating method for silane pyrolysis reactor

1981-08-14

1982-07-27

Peters, G. O.

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

156613, C01B 2302, C30B 2510

Patent

active

043417493

ABSTRACT:
An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant.

REFERENCES:
patent: 2993763 (1961-07-01), Lewis
patent: 3012861 (1961-12-01), Ling
patent: 3014791 (1961-12-01), Benzing et al.
patent: 4084024 (1978-04-01), Schumacher
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4207360 (1980-06-01), Padovani et al.
Eversteyn, E. C. et al., "J. Electrochem. Soc.", vol. 117, 1970, p. 925.

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