Mount for supporting substrates and plasma processing apparatus
Muffle etch injector assembly
Multi-cathode electron beam plasma etcher
Multi-planar electrode plasma etching
Multi-ply rolled paper separating device and method of use
Multi-step combined mechanical/thermal process for removing coat
Multi-tipped field-emission tool for nanostructure fabrication
Multi-zone RF inductively coupled source configuration
Multichamber integrated process system
Multiple elliptical ball plasma apparatus