Multiple elliptical ball plasma apparatus

Details Multiple elliptical ball plasma apparatus Multiple elliptical ball plasma apparatus

2006-10-31

2006-10-31

Alejandro-Mulero, Luz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C118S7230MW

Reexamination Certificate

active

07128805

ABSTRACT:
A plasma generating device, has a plurality of cavities shaped like half-ellipsoids, a plasma cavity, and microwave sources. The present invention takes advantage of geometrical properties of the propagation of electromagnetic waves by enclosing an electromagnetic field in the microwave range in overlapping cavities that together are shaped like a plurality of half ellipsoids. Each of the cavities has a first focus and a second focus, with the first foci of the cavities place close to each other. Microwaves entering the cavities at the second foci propagate inside the cavity and are focused at the first foci. The area around the first foci of both half ellipsoids forms a plasma cavity, providing a large volume filled with a microwave field. Thereby an increased volume of an electromagnetic field and thus of a plasma is achieved.

REFERENCES:
patent: 4913929 (1990-04-01), Moslehi et al.
patent: 4940015 (1990-07-01), Kobashi et al.
patent: 5133825 (1992-07-01), Hakamata et al.
patent: 5954882 (1999-09-01), Wild et al.
patent: 6645343 (2003-11-01), Wild et al.
patent: 6670741 (2003-12-01), Ishii

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