4. Abrading
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System and method for automatically compensating for...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for chemical mechanical planarization

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for chemical mechanical polishing using...

Abrading – Abrading process – Combined abrading
Reexamination Certificate

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System and method for CMP having multi-pressure zone loading...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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System and method for CMP having multi-pressure zone loading...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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System and method for CMP head having multi-pressure annular...

Abrading – Work holder – Work rotating
Reexamination Certificate

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System and method for CO.sub.2 cleaning of data storage disks

Abrading – Abrading process – With critical temperature modification or control of work or...
Patent

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System and method for controlled polishing and planarization...

Abrading – Machine – Rotary tool
Reexamination Certificate

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System and method for controlled polishing and planarization...

Abrading – Machine – Rotary tool
Reexamination Certificate

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System and method for controlling a multi-arm polishing tool

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for controlling a polishing machine

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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System and method for controlling a wafer polishing process

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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System and method for controlling humidity in a cryogenic...

Abrading – Machine – Sandblast
Reexamination Certificate

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System and method for detecting abrasive article orientation

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for detecting CMP endpoint via direct...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for dressing a wafer polishing pad

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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System and method for duplicating keys

Abrading – Abrading process – Razor – knife – or scissors sharpening
Reexamination Certificate

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System and method for edge blending hard drive head sliders

Abrading – Abrading process – Utilizing nonrigid tool
Reexamination Certificate

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System and method for electropolishing nonuniform pipes

Abrading – Precision device or process - or with condition responsive...
Reexamination Certificate

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System and method for end-point detection in a multi-head...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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