System and method for CO.sub.2 cleaning of data storage disks

Details System and method for CO.sub.2 cleaning of data storage disks System and method for CO.sub.2 cleaning of data storage disks

1999-02-22

2000-09-19

Scherbel, David A.

Abrading

Abrading process

With critical temperature modification or control of work or...

451 63, 451413, B24B 100

Patent

active

061203572

ABSTRACT:
Systems and methods of thermal control in the carbon dioxide cleaning of data storage disks to reduce or prevent condensation on the surface of the media during cleaning with frozen carbon dioxide are disclosed. A hub recess receives at least a portion of the outer flange of the hub to improve contact between the data storage media and a media platform supporting the media. Contact between the media and the media platform may be further improved by drawing a vacuum through openings in the media platform. In addition, drawing a vacuum through a vacuum channel with an annular ring opening about the media platform and a tangential vacuum port may reduce fluttering of the media on the media platform.

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Motemaster.TM. Article entitled "Experiment on Spin-Cleaning of Patterned Silicon Wafer Using Co.sub.2 Snow," John F. Wilford, Emadel Enterprises, Inc., Sep. 1995, pp. 1-6 and FIGS. 1-6.

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