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Retaining ring with shaped surface

Abrading – Work holder – Work rotating
Reexamination Certificate

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Retaining ring with wear pad for use in chemical mechanical...

Abrading – Work holder – Work rotating
Reexamination Certificate

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Retaining ring with wear pad for use in chemical mechanical...

Abrading – Work holder – Work rotating
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Retaining rings, planarizing apparatuses including retaining...

Abrading – Work holder – Work rotating
Reexamination Certificate

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Rotary drum holder

Abrading – Work holder
Patent

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Rotary union for coupling fluids in a wafer polishing apparatus

Abrading – Work holder – Vacuum
Patent

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Rotary union for semiconductor wafer applications

Abrading – Work holder – Work rotating
Reexamination Certificate

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Row carrier for precision lapping of disk drive heads and...

Abrading – Work holder – Clamp
Reexamination Certificate

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Self-aligning blade angle guide

Abrading – Work holder – Clamp
Reexamination Certificate

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Self-aligning tool for hands-free cross-sectioning of an...

Abrading – Work holder
Reexamination Certificate

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Self-centering steady rest clamping device

Abrading – Work holder – Clamp
Reexamination Certificate

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Self-powered carrier for polishing or planarizing wafers

Abrading – Work holder
Reexamination Certificate

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Semiconductor device incorporating hemispherical solid...

Abrading – Work holder – Clamp
Reexamination Certificate

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Semiconductor wafer carrier stage for chemical mechanical polish

Abrading – Work holder – Vacuum
Patent

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Semiconductor wafer handler

Abrading – Work holder – Vacuum
Reexamination Certificate

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Structure and method for three chamber CMP polishing head

Abrading – Work holder – Work rotating
Patent

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Substrate holder, method for polishing substrate, and method...

Abrading – Work holder
Reexamination Certificate

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Substrate holding device and polishing device

Abrading – Work holder – Vacuum
Reexamination Certificate

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System and method for CMP head having multi-pressure annular...

Abrading – Work holder – Work rotating
Reexamination Certificate

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System for the profile machining with templates of slabs of marb

Abrading – Work holder – Vacuum
Patent

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