Method for controlling a process in a multi-zonal apparatus

Method for controlling MRE stripe height

Method for controlling polishing time in chemical-mechanical...

Method for controlling the forces applied to a...

Method for cutting slices from a workpiece

Method for deciding a bevel curve, method for determining a...

Method for deciding a bevel curve, method for determining...

Method for deciding a bevel curve, method for determining...

Method for deciding a bevel curve, method for determining...

Method for detecting the presence of a substrate in a...

Method for determining chemical mechanical polishing time

Method for determining the lens grinding error and contour follo

Method for endpoint detection for copper CMP

Method for estimating polishing profile or polishing amount,...

Method for estimating polishing profile or polishing amount,...

Method for force correction

Method for forming a grinding worm for forming a conical...

Method for forming grooves on workpiece and for dressing a...

Method for grinding a bar of thin film magnetic elements...

Method for grinding convex running faces and outside...