Method for controlling the forces applied to a...

Abrading – Precision device or process - or with condition responsive... – Computer controlled

Reexamination Certificate

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C451S008000, C451S021000, C451S056000

Reexamination Certificate

active

07901267

ABSTRACT:
A method and apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and materials handling. The method and apparatus utilizes a vacuum capability to pull waste material out of the polishing pad and through the apertured conditioning disk to evacuate the apparatus through an outlet port. The apparatus also includes a force adjustment system for providing measurement and control of the force applied by the conditioning disk to the polishing pad.

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patent: 7229336 (2007-06-01), Moore

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