Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2011-03-08
2011-03-08
Eley, Timothy V (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S021000, C451S056000
Reexamination Certificate
active
07901267
ABSTRACT:
A method and apparatus for conditioning polishing pads that utilizes an apertured conditioning disk for introducing operation-specific slurries, without the need for additional tooling, platens, and materials handling. The method and apparatus utilizes a vacuum capability to pull waste material out of the polishing pad and through the apertured conditioning disk to evacuate the apparatus through an outlet port. The apparatus also includes a force adjustment system for providing measurement and control of the force applied by the conditioning disk to the polishing pad.
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Eley Timothy V
Koba Wendy W.
TBW Industries Inc.
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