Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-06-26
2007-06-26
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C700S164000
Reexamination Certificate
active
11599351
ABSTRACT:
A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.
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Fukuda Akira
Hirokawa Kazuto
Hiyama Hirokuni
Mochizuki Yoshihiro
Sakurai Kunihiko
Ackun Jr. Jacob K.
Ebara Corporation
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