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Performing chemical mechanical polishing of oxides and metals us

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Patent

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Phase adjusting method and recess machining apparatus and...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Piezo-actuated CMP carrier

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarization apparatus

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarization apparatus

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Planarization apparatus and method

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarizing and polishing apparatus and planarizing and...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarizing machines and alignment systems for mechanical...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
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Planarizing machines and control systems for mechanical...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarizing machines and methods for dispensing planarizing...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planarizing pads, planarizing machines, and methods for...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Plane constructed shaft system used in precision polishing...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Planing and polishing machine

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Plate-like glass material, etc., working device

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Plated grinding wheel life maximization method

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Platen and head rotation rates for monitoring chemical...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Platen and head rotation rates for monitoring chemical...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Platen and manifold for polishing workpieces

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Platen assembly, apparatus having the platen assembly and...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Plating removing apparatus for three-piece wheel

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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