Platen assembly, apparatus having the platen assembly and...

Details Platen assembly, apparatus having the platen assembly and... Platen assembly, apparatus having the platen assembly and...

2007-02-06

2008-10-07

Rose, Robert (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With feeding of tool or work holder

C451S307000, C451S303000

Reexamination Certificate

active

07431634

ABSTRACT:
In a platen assembly for a polishing apparatus, a platen supports a polishing belt that makes contact with an object during a polishing process, so that the platen provides a pressure on the polishing belt during the polishing process. A plurality of first bladders extends in a first direction on an entire surface of the platen and is spaced apart by a uniform distance, and the first bladders apply pressure to the polishing belt. A plurality of second bladders extends in the first direction on a middle portion of the surface of the platen between a central portion and a peripheral portion of the platen and is positioned between the first bladders, and the second bladders apply pressure to the polishing belt. The pressures of the bladders are individually controlled by pressure controllers. Various pressures are individually applied different portions of the polishing belt by the bladders.

REFERENCES:
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patent: 5558568 (1996-09-01), Talieh et al.
patent: 5916012 (1999-06-01), Pant et al.
patent: 5980368 (1999-11-01), Chang et al.
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patent: 6244945 (2001-06-01), Weldon et al.
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patent: 6607425 (2003-08-01), Kistler et al.
patent: 2005/0113010 (2005-05-01), Kim
patent: 2005-11977 (2005-01-01), None
patent: 10-2005-0050872 (2005-06-01), None

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