Chemical delivery apparatus for CVD or ALD

Details Chemical delivery apparatus for CVD or ALD Chemical delivery apparatus for CVD or ALD

2009-07-09

2010-11-16

Lee, Kevin L (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

C137S209000, C137S240000

Reexamination Certificate

active

07832432

ABSTRACT:
Embodiments described herein provide ampoule assemblies to contain, store, or dispense chemical precursors. In one embodiment, an ampoule assembly is provided which includes an ampoule containing a first material layer disposed on the outside of the ampoule and a second material layer disposed over the first material layer, wherein the first material layer is thermally more conductive than the second material layer, an inlet line in fluid communication with the ampoule and containing a first manual shut-off valve disposed therein, an outlet line in fluid communication with the ampoule and containing a second manual shut-off valve disposed therein, and a first bypass line connected between the inlet line and the outlet line. In some embodiments, the ampoule assembly may contain disconnect fittings. In other embodiments, the first bypass line has a shut-off valve disposed therein to fluidly couple or decouple the inlet line and the outlet line.

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International Search Report and Written Opinion dated Oct. 2, 2008 for International Application No. PCT/US07/64276. (APPM/10885PCT).

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