4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Zongyu Li

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Etching an oxidized organo-silane film

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Utility Patent

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High-density plasma etching of carbon-based low-k materials...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Magnetically-enhanced plasma chamber with non-uniform magnetic f

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Shield or ring surrounding semiconductor workpiece in plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
Reexamination Certificate

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Shield or ring surrounding semiconductor workpiece in plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1899022

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