Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
Inventor
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Deposition of amorphous silicon films by high density plasma...
Deposition-selective etch-deposition process for dielectric...
HDP-CVD multistep gapfill process
High density plasma chemical vapor deposition (HDP-CVD)...
Low-bias-deposited high-density-plasma...
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