4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Zhengquan Tan

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HDP-CVD deposition of low dielectric constant amorphous...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Hydrogen assisted undoped silicon oxide deposition process...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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