4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Yung-Tsun Lo

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Chemical vapor deposition of tungsten(W-CVD) process for growing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Method for actually measuring misalignment of via

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method for reducing the reflectivity of a silicide layer

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Method for stabilizing a silicon structure after ion implantatio

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Patent

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Method of fabricating a bonding pad structure for improving...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-691117

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