4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

Yuko Yamaguchi

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Antireflection film and exposure method

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Chemically amplified resist composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Heat treatment apparatus and method of heat treatment

Drying and gas or vapor contact with solids – Apparatus – Sheet – web – or strand
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Heat treatment apparatus and method of semiconductor wafer

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Pattern forming method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Profile ID: LFUS-PAI-P-2025264

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