Heat treatment apparatus and method of heat treatment

Details Heat treatment apparatus and method of heat treatment Heat treatment apparatus and method of heat treatment

2005-02-01

2005-02-01

Rinehart, Kenneth (Department: 3749)

Drying and gas or vapor contact with solids

Apparatus

Sheet, web, or strand

C034S195000, C034S480000, C034S072000, C034S074000, C034S079000

Reexamination Certificate

active

06848198

ABSTRACT:
A heat treatment apparatus for preventing quality defects of an object to be heat-treated even when sublimating components produced in heat treatment become solids and drop down in the heat treatment apparatus, wherein a gas generated when heating an object to be heat-treated, coated with a coating solution and placed on a stage is passed through a trap made of a permeable porous film and is exhausted from an exhaust port of a cover and wherein solids produced and dropping down when gas passed through the trap of the permeable porous film solidifies at a top plate of the cover are trapped by the trap.

REFERENCES:
patent: 4656757 (1987-04-01), Oschmann
patent: 4870760 (1989-10-01), Graff
patent: 5390428 (1995-02-01), Pummell

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