Fine positioning device

Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means

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Details

318116, 318687, 318638, 310317, G05D 1500, G05B 1101

Patent

active

046864407

ABSTRACT:
A fine positioning device is constructed of a parallel flexible-beam displacement mechanism and/or a radial flexible-beam displacement mechanism. The former displacement mechanism comprises a first rigid portion rigid against forces, a second rigid portion rigid against forces, plural parallel flexible beams connecting the first and second rigid portions together, and a first actuator adapted to have the plural flexible beams undergo bending deformation. The latter displacement mechanism comprises a third rigid portion rigid against torques, a fourth rigid portion rigid against torques, plural radial flexible beams connecting the third and fourth rigid portions together, and a second actuator adapted to have the plural flexible beams undergo bending deformation. The fine positioning device can obtain fine linear displacements and/or fine angular displacement with good accuracy. This invention also facilitates the construction of multi-axis positioning devices.

REFERENCES:
patent: 4019109 (1977-04-01), McCoy
patent: 4087729 (1978-05-01), Yamazaki

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