4. Adhesive bonding and miscellaneous chemical manufacture
  5. Delaminating processes adapted for specified product
  6. Delaminating in preparation for post processing recycling step

Yoshikazu Sakano

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Dry etching method for semiconductor substrate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Dry etching process for semiconductor

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Patent

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Dry etching process for semiconductor

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Dry etching process for semiconductor

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Method of forming a trench with a rounded bottom in a...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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