4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Yoshihisa Ooaeh

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Charged particle beam exposure method and apparatus therefor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged particle exposure apparatus, and a charged particle expo

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Charged-particle-beam exposure device and charged-particle-beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle-beam exposure device and charged-particle-beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Charged-particle-beam exposure device and charged-particle-beam

Radiant energy – Means to align or position an object relative to a source or...
Patent

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Profile ID: LFUS-PAI-P-905142

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